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Invited talk on Mechanical flexible sensors based on silicon and organics
Tayeb Mohammed-Brahim
Head of Microelectronics & Microsensors Department, Institute of Electronics and Telecommunications
Rennes 1 University
Director of the Common Center on Microelectronics
west of France


Flexible electronics becomes a major research domain due to a fast growing market. Mechanical sensors on flexible substrates are used in a wide variety of applications such as robotics, health monitoring, epidermal electronics, intelligent textile or automotive and aeronautics. The main purpose is to measure the variation of the pressure or the acceleration on conformable substrates. Organic semiconductors but also silicon are the main materials used to fabricate deformation gauges at low temperature on flexible substrates. Organic materials are trendy, mainly due to their novelty and the possibility to fabricated organic based devices at lower temperature than 100°C. However their sensitivity to deformation is low. Moreover their geometrical dimensions are on the millimeter level that limits the spatial resolution. Crystallized silicon based gauges can be fabricated at lower temperature than 180°C that is a little bit higher. However their sensitivity is much higher. High spatial resolution on the order of micrometer is reached when using photolithography. Finally their reliability is much higher on long time. Organic based gauges can be used in the applications that need short time use, for example in the medical patches to measure the human pulse waves. Silicon based gauges can be used during longer time in the applications that need high deformation sensitivity or high spatial resolution for example to measure a pressure field.
The talk will review these particular properties and will give some examples of the use of such deformation gauges.


Tayeb Mohammed-Brahim is currently professor in Rennes 1 University (France), Head of Microelectronics & Microsensors Department of the Institute of Electronics and Telecommunications of Rennes and Director of the Common Center on Microelectronics in the west of France.

He got his PhD (Doctorat d'Etat) in Paris-XI University (France) and he founded the thinfilm Laboratory in Algiers University (Algeria). Then he moved to Caen University (France) where he created the reliability Laboratory. After that and since 2000, he moved to Rennes University where he became the head of Microelectronics Group becoming the Microelectronics and Microsensors Department after 2002.

He is mainly involved in low temperature fabrication of thin film electronic devices for flexible electronics and in the fabrication of sensors. Previously he activated a lot on chemical and biologic sensors for the measurement of pH, the detection of DNA and the quantification of proteins. Presently, his main activities focus on mechanical sensors for health applications. He is author of more than 300 papers on these different fields.